RF Magnetron Sputtering Machine
The Electron Science Research Institute (ESRI) engages in fundamental and applied nanotechnology research and development. Research activities cover the areas of design, fabrication, and characterisation of photonic devices based on magnetically reconfigurable integrated photonic nanostructures (magnetic photonic crystals).
ESRI has recently established an RF Magnetron Sputtering System and Focused Ion Beam/Scanning Electron Microscope (FIB/SEM) Facility dedicated to the fabrication of advanced photonic nanodevices, such as arrayed high-speed optical intensity modulators, waveguide-integrated isolators and microresonators, photonic switches, magneto-optic sensors and complex magnetic photonic crystal structures. ESRI has an extensive range of nanofabrication process-related and photonic characterisation equipment suitable for the post-fabrication testing of advanced photonic devices.
By 2012 ESRI will have a 240m2 clean room in addition to around 700m2 of laboratories and office space in ECU’s new Computing, Engineering and Technology building, which will be equipped with world class vacuum equipment, including mask aligner, spin coater, convection oven, surface profiler, photoluminescence mapper, reactive ion etcher (RIE), PECVD, wet oxidation furnace, rapid thermal annealer (RTA), bonding machine, and e-beam evaporator.
Through our established international research collaboration network with leading nanotechnology institutions, ESRI also has access to semiconductor, laser and nanophotonic fabrication facilities in China and South Korea. ESRI’s nanophotonic facilities are suitable for the synthesis of new and advanced photonic materials that could lead to new science and new technologies.