In-Situ Real-Time Optoelectronic Process Control System
Prof. Kamal Alameh, WA Centre for Excellence for Micro Photonic Systems (COMPS).
Multilayer thin film and photonic crystal manufacturing processes, Solar Power, Silicon Chip Production.
Provisional Patent application filed.
This novel system for measuring the thickness of layers of nano-particles, particularly during the deposition process, is already attracting international interest. A working model is currently in use in the COMPS labs, and has been produced for a fraction of the cost of the main competing technology, the ellipsometer.